Limited yield estimation for visual defect sources

IEEE Transactions on Semiconductor Manufacturing

Volumn 10, Issue 1, 1997, Pages 17-23

  Mullenix, Paul ^b   Zalnoski, Jim ^b   Kasten, Alan J ^a,b  

^a IEEE

^b INTERSIL CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL DEFECTS; ERRORS; INSPECTION; MATERIALS TESTING; PARAMETER ESTIMATION; SEMICONDUCTOR MATERIALS;

INSPECTION ERROR; INTEGRATED YIELD MANAGEMENT SYSTEM; LIMITED YIELD ESTIMATION; VISUAL DEFECT SOURCES;

INTEGRATED CIRCUIT MANUFACTURE;

EID: 0031077148     PISSN: 08946507     EISSN: None     Source Type: Journal    
DOI: 10.1109/66.554478     Document Type: Article

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