Model-free estimation of defect clustering in integrated circuit fabrication

IEEE Transactions on Semiconductor Manufacturing

Volumn 10, Issue 3, 1997, Pages 344-359

  Friedman, David J ^a   Hansen, Mark H ^b   Nair, Vijayan N ^c   James, David A ^b  

^a Integral Inc   (United States)

^b LUCENT TECHNOLOGIES   (United States)

^c UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; COST EFFECTIVENESS; DEFECTS; ESTIMATION; MATHEMATICAL MODELS;

DEFECT CLUSTERING; MODEL FREE ESTIMATION;

INTEGRATED CIRCUIT MANUFACTURE;

EID: 0031199871     PISSN: 08946507     EISSN: None     Source Type: Journal    
DOI: 10.1109/66.618208     Document Type: Article

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