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Volumn 3, Issue 1, 2005, Pages 51-73

Micro-motion selective-actuation X Y Z flexure parallel mechanism: Design and modeling

Author keywords

Flexure; Micro motion; Pseudo rigid body; Selective actuation

Indexed keywords

CONTROL SYSTEM SYNTHESIS; DEFORMATION; DEGREES OF FREEDOM (MECHANICS); KINEMATICS; MATHEMATICAL MODELS; MECHANISMS; MICROACTUATORS; MOTION CONTROL; OPTIMAL CONTROL SYSTEMS;

EID: 22244460841     PISSN: 13892258     EISSN: None     Source Type: Journal    
DOI: 10.1163/156856305323383919     Document Type: Article
Times cited : (19)

References (19)
  • 2
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    • Optimal design of a flexure hinge based XYθ wafer stage
    • J. Ryu, D. G. Gweon and K. Moon, Optimal design of a flexure hinge based XYθ wafer stage, Precision Engineering 2 (1), 18-28 (1997).
    • (1997) Precision Engineering , vol.2 , Issue.1 , pp. 18-28
    • Ryu, J.1    Gweon, D.G.2    Moon, K.3
  • 3
    • 0032642363 scopus 로고    scopus 로고
    • Inverse kinematic modeling of a coupled flexure hinge mechanism
    • J. Ryu, S. Lee, D. Gweon and K. Moon, Inverse kinematic modeling of a coupled flexure hinge mechanism, Mechatronics 9, 658-674 (1999).
    • (1999) Mechatronics , vol.9 , pp. 658-674
    • Ryu, J.1    Lee, S.2    Gweon, D.3    Moon, K.4
  • 7
    • 0033350577 scopus 로고    scopus 로고
    • A six-degree-of-freedom micro-manipulator based on piezoelectric translators
    • P. Gao and S.-M. Swei, A six-degree-of-freedom micro-manipulator based on piezoelectric translators, Nanotechnology 10, 447-452 (1999).
    • (1999) Nanotechnology , vol.10 , pp. 447-452
    • Gao, P.1    Swei, S.-M.2
  • 10
    • 0344559903 scopus 로고    scopus 로고
    • Six degree-of-freedom fine motion mechanism using parallel mechanism
    • T. Oiwa and M. Hirano, Six degree-of-freedom fine motion mechanism using parallel mechanism, Journal of Japan Society of Precision Engineering 65 (10), 1425-1429 (1999).
    • (1999) Journal of Japan Society of Precision Engineering , vol.65 , Issue.10 , pp. 1425-1429
    • Oiwa, T.1    Hirano, M.2
  • 11
    • 4544259367 scopus 로고    scopus 로고
    • Design of a low-cost nano-manipulator which utilizes a monolithic, spatial compliant mechanism
    • M. L. Culpepper and G. Anderson, Design of a low-cost nano-manipulator which utilizes a monolithic, spatial compliant mechanism, Precision Engineering 28, 469-482 (2004).
    • (2004) Precision Engineering , vol.28 , pp. 469-482
    • Culpepper, M.L.1    Anderson, G.2
  • 15
    • 22244476521 scopus 로고    scopus 로고
    • Positioning mechanism
    • Melles Griot Limited
    • Davis, A. Philips and Melles Griot Limited, Positioning mechanism, US Patent Application 702353 (2000).
    • (2000) US Patent Application 702353
    • Davis, A.P.1
  • 16
    • 22244444630 scopus 로고    scopus 로고
    • Laboratoire de Systemes Robotiques EPFL-LSRO, website
    • Laboratoire de Systemes Robotiques EPFL-LSRO, website http://lsro.epfl.ch
  • 17
    • 0000112064 scopus 로고
    • How to design flexure hinges
    • J. M. Paros and L.Weisbord, How to design flexure hinges, Machine Design 37, 151-156 (1965).
    • (1965) Machine Design , vol.37 , pp. 151-156
    • Paros, J.M.1    Weisbord, L.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.