Fabrication of 3D functionalized microstructure via scanning probe lithography and self-assembly methods

Journal of Nanoscience and Nanotechnology

Volumn 7, Issue 11, 2007, Pages 4161-4164

  Choi, Inhee ^a   Kang, Sung Koo ^a   Lee, Jeongjin ^a   Kim, Younghun ^b   Yi, Jongheop ^a  

^a Seoul National University   (South Korea)

^b Kwangwoon University   (South Korea)

Author keywords

3D Structure; AFM anodic oxidation; Lateral force microscopy (LFM); Scanning probe lithography (SPL); Self assembly

Indexed keywords

(2+1)-DIMENSIONAL; 3 DIMENSIONAL; APPLIED (CO); CHEMICAL FUNCTIONALITIES; FUNCTIONALIZED; GOLD NANOPARTICLES (NANO-AU); LATERAL-FORCE MICROSCOPY (LFM); LOW ASPECT RATIO (LAR); MODIFIED LAYER; ORGANOSILANE; PLANAR PATTERN; SCANNING PROBE LITHOGRAPHY (SPL); SELF ASSEMBLY TECHNIQUES; SELF-ASSEMBLY METHODS; SI(0 0 1) SURFACE; SPATIAL RESOLUTION (SR); THREE-DIMENSIONAL (3D) STRUCTURING;

ASPECT RATIO; DIMENSIONAL STABILITY; FABRICATION; GOLD; LITHOGRAPHY; NANOSTRUCTURED MATERIALS; OPTICAL DESIGN; SCANNING;

SELF ASSEMBLY;

NANOMATERIAL; POLYMER;

ARTICLE; CHEMISTRY; CONFORMATION; CRYSTALLIZATION; MACROMOLECULE; MATERIALS TESTING; METHODOLOGY; NANOTECHNOLOGY; PARTICLE SIZE; PHOTOGRAPHY; SCANNING PROBE MICROSCOPY; SURFACE PROPERTY; ULTRASTRUCTURE;

CRYSTALLIZATION; MACROMOLECULAR SUBSTANCES; MATERIALS TESTING; MICROSCOPY, SCANNING PROBE; MOLECULAR CONFORMATION; NANOSTRUCTURES; NANOTECHNOLOGY; PARTICLE SIZE; PHOTOGRAPHY; POLYMERS; SURFACE PROPERTIES;

EID: 38449109579     PISSN: 15334880     EISSN: None     Source Type: Journal    
DOI: 10.1166/jnn.2007.032     Document Type: Conference Paper

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