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Applied Physics Letters

Volumn 77, Issue 6, 2000, Pages 770-772

Submicrometer resolution Yablonovite templates fabricated by x-ray lithography

(5) Cuisin, C a Chelnokov, A a Lourtioz, J M a Decanini, D b Chen, Y b

a UNIVERSITÉ PARIS SACLAY (France)

b CNRS (France)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000464087 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.1306646 Document Type: Article

Times cited : (44)

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