High-accuracy EUV metrology of PTB using synchrotron radiation

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4344, Issue 1, 2001, Pages 402-413

  Scholze, F ^a   Beckhoff, B ^a   Brandt, G ^a   Fliegauf, R ^a   Gottwald, A ^a   Klein, R ^a   Meyer, B ^a   Schwarz, U ^a   Thornagel, R ^a   Tummler J ^a   Vogel, K ^a   Weser, J ^a   Ulm, G ^a  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

Detector calibration; Irradiation testing; Metrology; Reflectometry

Indexed keywords

BANDWIDTH; IRRADIATION; MONOCHROMATORS; RADIATION DETECTORS; RADIOMETRY; REFLECTOMETERS; SYNCHROTRON RADIATION; ULTRAVIOLET RADIATION;

EXTREME ULTRAVIOLET LITHOGRAPHY (EUVL);

PHOTOLITHOGRAPHY;

EID: 0010572823     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.436766     Document Type: Article

References (20)