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Volumn 45, Issue 1, 2004, Pages 227-230

PZT cantilevers integrated with heaters and new piezoelectric sensors for SPM-based nano-data storage application

Author keywords

Cantilever; Nano storage; Piezoelectric sensor; PZT; SPM

Indexed keywords


EID: 3843099141     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Conference Paper
Times cited : (12)

References (13)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.