Annealing effect on the optical properties and the residual stress of E-Beam-Evaporated TiO2 Thin Films

Journal of the Korean Physical Society

Volumn 51, Issue 6, 2007, Pages 2014-2018

  Kim, Jang Seob ^a   Hahn, Sung Hong ^a   Kim, Eui Jung ^a  

^a University of Ulsan   (South Korea)

Author keywords

Annealing; E beam evaporation; Residual stress

Indexed keywords

EID: 38349156646     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: 10.3938/jkps.51.2014     Document Type: Article

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