Adhesion and tribological properties of sputtered polymer thin films with thermally stable polymer targets

Shinku/Journal of the Vacuum Society of Japan

Volumn 50, Issue 10, 2007, Pages 619-624

  Iwamori, Satoru ^a  

^a KANAZAWA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; CHEMICAL BONDS; COPPER; POLYMER FILMS; POLYTETRAFLUOROETHYLENES; SPUTTERING; TRIBOLOGY;

FRICTION COEFFICIENTS; SPUTTERED THIN FILMS;

THIN FILMS;

EID: 38349140166     PISSN: 05598516     EISSN: None     Source Type: Journal    
DOI: 10.3131/jvsj.50.619     Document Type: Review

References (13)

1. H. Biederman: Vacuum, 59, 594 (2000).
2. M. Kitoh and Y. Honda: Thin Solid Film, 271, 92, (1995).
3. Y. Yamada, K. Tanaka and K. Saitoh: Surface Coatings Technology, 43/44, 618 (1990).
4. G. A. Hishmeh, T. L. Barr, A. Sklyarov and S. Hardcastle: J. Vac. Sci. Technol., A14(3), 1330 (1996).
5. H. Biederman: Vacuum, 31, 285 (1995).
6. N. Marechal and Y. Pauleau: J. Vac. Sci. Technol., A10(3), 477 (1992).
7. H. Biederman, M. Zeuner, J. Zalman, P. Bilkova, V. Stelmasuk and A. Boldyreva: Thin Solid Films, 392, 208 (2001).
8. Y. Nagayama, S. Iwamori and Y. Yamada: J. Vac. Soc. Jpn., 46, 827 (2003).
9. S. Iwamori, Y. Yamada and K. Ikeda: Materials Science and Technology, 42, 54 (2005).
10. Y. Yamada, S. Iwamori and Y. Takahashi: J. Vac. Soc. Jpn., 47, 574 (2004).
11. S. Iwamori, A. Uemuraand Y. Yamada: J. Adhes. Sci. Technol., 18, 1771 (2004).
12. S. Iwamori, N. Yanagawa, M. Sadamoto, R. Nara and S. Nakahara, in: Polyimides and Other High Temperature Polymers, Vol. 2, K. L. Mittal (Ed), p407, VSP, Utrecht (2003).
13. S. Iwamori and A. Uemura: J. Adhes. Soc. Jpn., 42, 89 (2006).