Mechanical properties of polytetrafluoroethylene (PTFE) thin film sputtered on the metal substrates

Shinku/Journal of the Vacuum Society of Japan

Volumn 46, Issue 12, 2003, Pages 827-834

  Nagayama, Yuichi ^a,b   Iwamor, Satoru ^a   Yamada, Yoshiho ^a  

^a KANAZAWA UNIVERSITY   (Japan)

^b HITACHI LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; CHEMICAL BONDS; COPPER; DURABILITY; FRICTION; MECHANICAL PROPERTIES; METALLIC FILMS; SPUTTERING; SURFACE CHEMISTRY; THIN FILMS;

ADHESION STRENGTH; SCRATCH DURABILITY; SPUTTER DEPOSITION RATE;

POLYTETRAFLUOROETHYLENES;

EID: 13444304690     PISSN: 05598516     EISSN: None     Source Type: Journal    
DOI: 10.3131/jvsj.46.827     Document Type: Article

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