Use of optical absorption spectroscopy for the characterization of an ar-Ti magnetron discharge

Metals and Materials International

Volumn 13, Issue 6, 2007, Pages 483-488

  Britun, Nikolay ^a   Gaillard, Mireille ^a   Kim, Yong Mo ^a   Kim, Kab Seog ^a,b   Han, Jeon Geon ^a  

^a Sungkyunkwan University   (South Korea)

^b Institute for Plasma and Advanced Materials   (South Korea)

Author keywords

Magnetron; Metastable states; Optical absorption spectroscopy; Plasma; Titanium

Indexed keywords

ABSORPTION SPECTROSCOPY; GROUND STATE; LIGHT ABSORPTION; MAGNETRONS; PLASMAS; TITANIUM;

DISCHARGE CURRENTS; DISCHARGE PARAMETERS; MAGNETRON DISCHARGES; MAGNETRON SOURCES; META-STABLE STATE; METASTABLES; TI ATOMS; WORKING PRESSURES;

TITANIUM METALLOGRAPHY;

EID: 38349131604     PISSN: 15989623     EISSN: None     Source Type: Journal    
DOI: 10.1007/BF03027907     Document Type: Article

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