Thermal simulation and experimental results of a micromachined thermal inclinometer

Sensors and Actuators, A: Physical

Volumn 141, Issue 2, 2008, Pages 307-313

  Courteaud, J ^a   Combette, P ^a   Crespy, N ^a   Cathebras, G ^b   Giani, A ^a  

^a UNIV MONTPELLIER   (France)

^b LIRMM   (France)

Author keywords

Micromachined silicon; Simulation; Thermal inclinometer; Tilt measurements

Indexed keywords

COMPUTATIONAL FLUID DYNAMICS; COMPUTER SIMULATION; HEATING; OPTIMIZATION; RESISTORS; SENSITIVITY ANALYSIS; SILICON;

HEATING RESISTORS; MICROMACHINED THERMAL INCLINOMETERS; THERMAL SIMULATION; TILT MEASUREMENTS;

MEMS;

EID: 38149142584     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2007.09.008     Document Type: Article

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