Micromechanical inclinometer

Sensors and Actuators, A: Physical

Volumn 60, Issue 1-3, 1997, Pages 134-138

  Mescheder, Ulrich M ^a,b   Majer, Stefan ^a  

^a FURTWANGEN UNIVERSITY   (Germany)

^b PHILIPS RESEARCH LABORATORIES   (Germany)

Author keywords

Inclinometers; Micromechanics; Piezoresistance; Silicon

Indexed keywords

BONDING; COMPOSITE MICROMECHANICS; COMPUTER SIMULATION; ETCHING; FINITE ELEMENT METHOD; LOW TEMPERATURE OPERATIONS; MICROMACHINING; THICKNESS CONTROL; THREE DIMENSIONAL;

ELECTROCHEMICAL ETCH STOP; INCLINOMETER; PIEZORESISTANCE;

SILICON SENSORS;

EID: 0031144387     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)01387-3     Document Type: Article

References (7)

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