High G MEMS Integrated Accelerometer

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3046, Issue , 1997, Pages 52-62

  Davies, Brady R ^a   Barron, Carole Craig ^a   Montague, Stephen ^a   Smith, James H ^a   Murray, James R ^a   Christenson, Todd R ^a   Bateman, Vesta I ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

Accelerometer; Integrated mems; Micromachined sensors; Shock sensors

Indexed keywords

ACCELERATION; ACCELEROMETERS; CAPACITANCE; CHEMICAL MECHANICAL POLISHING; CMOS INTEGRATED CIRCUITS; MICROELECTRONIC PROCESSING; MICROELECTRONICS; PLATES (STRUCTURAL COMPONENTS); POLYCRYSTALLINE MATERIALS; POLYSILICON; SURFACE MICROMACHINING;

CHEMICAL MECHANICAL POLISHING(CMP); DESIGN AND IMPLEMENTATIONS; INTEGRATED MEMS; MICROMACHINED ACCELEROMETERS; MICROMACHINED SENSORS; PARALLEL PLATE CAPACITORS; SANDIA NATIONAL LABORATORIES; SHOCK SENSOR;

SUBSTRATES;

EID: 85076975754     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.276628     Document Type: Conference Paper

References (5)

1. W. P. Eaton and J. H. Smith, "Planar Surface-Micromachined Pressure Sensor with a Sub-Surface Embedded Reference Pressure Cavity", Proceedings ofSPIE Micromachined Devices and Components II, Vol. 2882, October, 1996.
2. T. C. Togami, W.E. Baker, and M.J. Forrestal, "A Split Hopkinson Bar Technique to Evaluate the Performance of Accelerometers", Journal ofApplied Mechanics, June, 1996.
3. T. B. Gabrielson, "Mechanical-Thermal Noise in Micromachined Acoustic and Vibration Sensors", IEEE Transactions on Electron Devices, Vol. 40, No. 5, May, 1993.
4. J. H. Smith, et. al., "Micromachined Sensor and Actuator Research at the Microelectronics Development Laboratory", SPIE, Vol. 2448, 1995.
5. M. A. Lemkin, M. A. Ortiz, N. Wongkomet, B. E. Boser, "A 3-Axis Surface Micromachined SD Accelerometer", submitted to ISSCC, 1997.