Zinc oxide thin film-based MEMS acoustic sensor with tunnel for pressure compensation

Sensors and Actuators, A: Physical

Volumn 141, Issue 2, 2008, Pages 256-261

  Arora, Aarti ^a   Arora, Anil ^a   Dwivedi, V K ^a   George, P J ^b   Sreenivas, K ^c   Gupta, Vinay ^c  

^a CENTRAL ELECTRONICS ENGINEERING RESEARCH INSTITUTE   (India)

^b KURUKSHETRA UNIVERSITY   (India)

^c UNIVERSITY OF DELHI   (India)

Author keywords

Acoustic sensor; Bulk micromachining; Tunnel; ZnO thin film

Indexed keywords

ACOUSTIC DEVICES; MEMS; PIEZOELECTRIC DEVICES; SENSITIVITY ANALYSIS; THIN FILMS; ZINC OXIDE;

ACOUSTIC SENSORS; BULK MICROMACHINING; PRESSURE COMPENSATION;

SENSORS;

EID: 38149049098     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2007.09.016     Document Type: Article

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