Identification, position sensing, and control of an electrostatically-driven polysilicon microactuator

Proceedings of the IEEE Conference on Decision and Control

Volumn 4, Issue , 1995, Pages 3545-3550

  Cheung, Patrick ^a   Horowitz, Roberto ^a   Howe, Roger T ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; CONTROL; ELECTRONICS PACKAGING; ELECTROSTATICS; FEEDBACK; IDENTIFICATION (CONTROL SYSTEMS); KALMAN FILTERING; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE MANUFACTURE; SUBSTRATES;

POLYSILICON MICROACTUATOR; POSITION SENSING; STATE VARIABLE FEEDBACK LOOP;

ACTUATORS;

EID: 0029507251     PISSN: 01912216     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (14)