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Surface and Coatings Technology

Volumn 202, Issue 10, 2008, Pages 2169-2175

Thermal stability of tungsten nitride films deposited by reactive magnetron sputtering

(1) Mohamed, S H a

a Sohag University (Egypt)

Author keywords

Magnetron sputtering; Optical properties; Structural; TGA and DTA analysis; Tungsten nitride

Indexed keywords

ACTIVATION ENERGY; CRYSTALLIZATION; ELECTRIC CONDUCTIVITY; INORGANIC COATINGS; NITRIDES; OPTICAL PROPERTIES; OXIDATION; REACTIVE SPUTTERING; THERMODYNAMIC STABILITY;

OXIDATION KINETICS; REACTIVE MAGNETRON SPUTTERING; TUNGSTEN NITRIDE;

MAGNETRON SPUTTERING;

ACTIVATION ENERGY; CRYSTALLIZATION; ELECTRIC CONDUCTIVITY; INORGANIC COATINGS; MAGNETRON SPUTTERING; NITRIDES; OPTICAL PROPERTIES; OXIDATION; REACTIVE SPUTTERING; THERMODYNAMIC STABILITY;

EID: 38049159965 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/j.surfcoat.2007.09.005 Document Type: Article

Times cited : (25)

References (26)

1
- 0002173308
- Hultman L. Vacuum 57 (2000) 1
- (2000) Vacuum , vol.57 , pp. 1
- Hultman, L.¹

2
- 0031396868
- Navinsek B., Panjan P., and Milosev I. Surf. Coat. Technol. 97 (1997) 182
- (1997) Surf. Coat. Technol. , vol.97 , pp. 182
- Navinsek, B.¹ Panjan, P.² Milosev, I.³

3
- 0003484135
- Academic Press, New York
- Toth L.E. Transition Metal Carbides and Nitrides (1971), Academic Press, New York
- (1971) Transition Metal Carbides and Nitrides
- Toth, L.E.¹

4
- 9744231392
- Lee B.H., and Yong K. J. Vac. Sci. Technol., B 22 (2004) 2375
- (2004) J. Vac. Sci. Technol., B , vol.22 , pp. 2375
- Lee, B.H.¹ Yong, K.²

5
- 0037425280
- Becker J.S., and Gordon R.G. Appl. Phys. Lett. 82 (2003) 2239
- (2003) Appl. Phys. Lett. , vol.82 , pp. 2239
- Becker, J.S.¹ Gordon, R.G.²

6
- 38049128311
- 5 Capacitors," IEEE 1998 Int. Interconnect Technol. Conf., San Francisco, CA (1998) 96
- (1998) 5 Capacitors," IEEE 1998 Int. Interconnect Technol. Conf., San Francisco, CA , pp. 96
- Park, B.-L.¹ Lee, M.-B.² Moon, K.-J.³ Lee, H.-D.⁴ Kang, H.-K.⁵ Lee, M.-Y.⁶

7
- 4344696616
- Shi C., Yang X.F., Zhu A.M., and Au C.T. Catal. Today 93-95 (2004) 819
- (2004) Catal. Today , vol.93-95 , pp. 819
- Shi, C.¹ Yang, X.F.² Zhu, A.M.³ Au, C.T.⁴

8
- 33846252835
- Zhong H., Zhang H., Liang Y., Zhang J., Wang M., and Wang X. J. Power Sources 164 (2007) 572
- (2007) J. Power Sources , vol.164 , pp. 572
- Zhong, H.¹ Zhang, H.² Liang, Y.³ Zhang, J.⁴ Wang, M.⁵ Wang, X.⁶

9
- 0027908023
- Aharonov R.R., Coll B.F., and Fontana R.P. Surf. Coat. Technol. 61 (1993) 223
- (1993) Surf. Coat. Technol. , vol.61 , pp. 223
- Aharonov, R.R.¹ Coll, B.F.² Fontana, R.P.³

10
- 0030217693
- Panjan P., Navinsek B., Cvelbar A., Zalar A., and Milosev I. Thin Solid Films 281-282 (1996) 298
- (1996) Thin Solid Films , vol.281-282 , pp. 298
- Panjan, P.¹ Navinsek, B.² Cvelbar, A.³ Zalar, A.⁴ Milosev, I.⁵

11
- 4243769966
- Huber E., and Hofmann S. Surf. Coat. Technol. 68-69 (1994) 64
- (1994) Surf. Coat. Technol. , vol.68-69 , pp. 64
- Huber, E.¹ Hofmann, S.²

12
- 13844254996
- Yamamoto T., Kawate M., Hasegawa H., and Suzuki T. Surf. Coat. Technol. 193 (2005) 372
- (2005) Surf. Coat. Technol. , vol.193 , pp. 372
- Yamamoto, T.¹ Kawate, M.² Hasegawa, H.³ Suzuki, T.⁴

13
- 9644268968
- Bereznai M., Toth Z., Caricato A.P., Fernandez M., Luches A., Majni G., Mengucci P., Nagy P.M., Juhasz A., and Nanai L. Thin Solid Films 473 (2005) 16
- (2005) Thin Solid Films , vol.473 , pp. 16
- Bereznai, M.¹ Toth, Z.² Caricato, A.P.³ Fernandez, M.⁴ Luches, A.⁵ Majni, G.⁶ Mengucci, P.⁷ Nagy, P.M.⁸ Juhasz, A.⁹ Nanai, L.¹⁰

14
- 0034301009
- Shen Y.G., and Mai Y.W. Appl. Surf. Sci. 167 (2000) 59
- (2000) Appl. Surf. Sci. , vol.167 , pp. 59
- Shen, Y.G.¹ Mai, Y.W.²

15
- 0037429928
- Byon E., Oates T.H., and Anders A. Appl. Phys. Lett. 82 (2003) 1634
- (2003) Appl. Phys. Lett. , vol.82 , pp. 1634
- Byon, E.¹ Oates, T.H.² Anders, A.³

16
- 38049124702
- Powder Diffraction Files. Joint Committee on Powder Diffraction Standards, JCPDS, Card 75-0988 (1999)
- (1999) Joint Committee on Powder Diffraction Standards, JCPDS, Card 75-0988
- Powder Diffraction Files¹

17
- 38049124702
- Powder Diffraction Files. Joint Committee on Powder Diffraction Standards, JCPDS, Card 33-1387 (1999)
- (1999) Joint Committee on Powder Diffraction Standards, JCPDS, Card 33-1387
- Powder Diffraction Files¹

18
- 38049124702
- Powder Diffraction Files. Joint Committee on Powder Diffraction Standards, JCPDS, Card 30-1387 (1999)
- (1999) Joint Committee on Powder Diffraction Standards, JCPDS, Card 30-1387
- Powder Diffraction Files¹

19
- 38049137831
- Kissinger H.E. J. Res. Natl. Bur. Stand. 57 217 (1956)
- (1956) J. Res. Natl. Bur. Stand. , vol.57 , Issue.217
- Kissinger, H.E.¹

20
- 33749213901
- Kissinger H.E. Anal. Chem. 29 (1957) 1702
- (1957) Anal. Chem. , vol.29 , pp. 1702
- Kissinger, H.E.¹

21
- 33646003938
- Augis J.A., and Bennett J.E. J. Therm. Anal. 13 (1978) 283
- (1978) J. Therm. Anal. , vol.13 , pp. 283
- Augis, J.A.¹ Bennett, J.E.²

22
- 0031117735
- Takeyama M., and Noya A. Jpn. J. Appl. Phys. 36 (1997) 2261
- (1997) Jpn. J. Appl. Phys. , vol.36 , pp. 2261
- Takeyama, M.¹ Noya, A.²

23
- 33947724850
- Mohamed S.H., and Anders A. Thin Solid Films 515 (2007) 5264
- (2007) Thin Solid Films , vol.515 , pp. 5264
- Mohamed, S.H.¹ Anders, A.²

24
- 3142700027
- O'Neill S., Parkin I.P., Clark J.H., Mills A., and Elliott N. Chem. Vap. Depos. 10 (2004) 136
- (2004) Chem. Vap. Depos. , vol.10 , pp. 136
- O'Neill, S.¹ Parkin, I.P.² Clark, J.H.³ Mills, A.⁴ Elliott, N.⁵

25
- 0038182962
- Cui H.N., Costa M.F., Teixeira V., Porqueras I., and Bertran E. Surf. Sci. 532-535 (2003) 1127
- (2003) Surf. Sci. , vol.532-535 , pp. 1127
- Cui, H.N.¹ Costa, M.F.² Teixeira, V.³ Porqueras, I.⁴ Bertran, E.⁵

26
- 14744291192
- Stankova M., Vilanova X., Llobet E., Calderer J., Bittencourt C., Pireaux J.J., and Correig X. Sens. Actuators, B, Chem. 105 (2005) 271
- (2005) Sens. Actuators, B, Chem. , vol.105 , pp. 271
- Stankova, M.¹ Vilanova, X.² Llobet, E.³ Calderer, J.⁴ Bittencourt, C.⁵ Pireaux, J.J.⁶ Correig, X.⁷

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