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Volumn 53, Issue 11, 2005, Pages 2483-2500

Extension of Stoney's formula to non-uniform temperature distributions in thin film/substrate systems. the case of radial symmetry

Author keywords

Interfacial shears; Non local effects; Non uniform film temperatures and stresses; Non uniform substrate curvatures; Stress curvature relations

Indexed keywords

CRYSTAL SYMMETRY; STRESSES; SUBSTRATES;

EID: 24944573870     PISSN: 00225096     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jmps.2005.06.003     Document Type: Article
Times cited : (73)

References (14)
  • 1
    • 0001474498 scopus 로고    scopus 로고
    • Large deformation and geometric instability of substrates with thin-film deposits
    • M. Finot, I.A. Blech, S. Suresh, and H. Fijimoto Large deformation and geometric instability of substrates with thin-film deposits J. Appl. Phys. 81 1997 3457 3464
    • (1997) J. Appl. Phys. , vol.81 , pp. 3457-3464
    • Finot, M.1    Blech, I.A.2    Suresh, S.3    Fijimoto, H.4
  • 2
    • 0033907470 scopus 로고    scopus 로고
    • Substrate curvature due to thin film mismatch strain in the nonlinear deformation range
    • L.B. Freund Substrate curvature due to thin film mismatch strain in the nonlinear deformation range J. Mech. Phys. Solids 48 2000 1159
    • (2000) J. Mech. Phys. Solids , vol.48 , pp. 1159
    • Freund, L.B.1
  • 4
    • 0035356845 scopus 로고    scopus 로고
    • Full field optical measurement of curvatures in ultra-thin film/substrate systems in the range of geometrically nonlinear deformations
    • H. Lee, A.J. Rosakis, and L.B. Freund Full field optical measurement of curvatures in ultra-thin film/substrate systems in the range of geometrically nonlinear deformations J. Appl. Phys. 89 2001 6116 6129
    • (2001) J. Appl. Phys. , vol.89 , pp. 6116-6129
    • Lee, H.1    Rosakis, A.J.2    Freund, L.B.3
  • 5
    • 0027609996 scopus 로고
    • Geometrically nonlinear stress-deflection relations for thin film/substrate systems
    • C.B. Masters, and N.J. Salamon Geometrically nonlinear stress-deflection relations for thin film/substrate systems Int. J. Eng. Sci. 31 1993 915 925
    • (1993) Int. J. Eng. Sci. , vol.31 , pp. 915-925
    • Masters, C.B.1    Salamon, N.J.2
  • 7
    • 0034225053 scopus 로고    scopus 로고
    • Effects of line and passivation geometry on curvature evolution during processing and thermal cycling in copper interconnect lines
    • T.-S. Park, and S. Suresh Effects of line and passivation geometry on curvature evolution during processing and thermal cycling in copper interconnect lines Acta Mater. 48 2000 3169 3175
    • (2000) Acta Mater. , vol.48 , pp. 3169-3175
    • Park, T.-S.1    Suresh, S.2
  • 8
    • 0344550345 scopus 로고    scopus 로고
    • Measurement of full field curvature and geometrical instability of thin film-substrate systems through CGS interferometry
    • T.-S. Park, S. Suresh, A.J. Rosakis, and J. Ryu Measurement of full field curvature and geometrical instability of thin film-substrate systems through CGS interferometry J. Mech. Phys. Solids 51 2003 2191 2211
    • (2003) J. Mech. Phys. Solids , vol.51 , pp. 2191-2211
    • Park, T.-S.1    Suresh, S.2    Rosakis, A.J.3    Ryu, J.4
  • 9
    • 0032117941 scopus 로고    scopus 로고
    • Full field measurements of curvature using coherent gradient sensing: Application to thin film characterization
    • A.J. Rosakis, R.P. Singh, Y. Tsuji, E. Kolawa, and N.R. Moore Full field measurements of curvature using coherent gradient sensing: application to thin film characterization Thin Solid Films 325 1998 42
    • (1998) Thin Solid Films , vol.325 , pp. 42
    • Rosakis, A.J.1    Singh, R.P.2    Tsuji, Y.3    Kolawa, E.4    Moore, N.R.5
  • 10
    • 0029255919 scopus 로고
    • Bifurcation in isotropic thin film/substrate plates
    • N.J. Salamon, and C.B. Masters Bifurcation in isotropic thin film/substrate plates Int. J. Solids Struct. 32 1995 473 481
    • (1995) Int. J. Solids Struct. , vol.32 , pp. 473-481
    • Salamon, N.J.1    Masters, C.B.2
  • 11
    • 3743109337 scopus 로고    scopus 로고
    • Stresses, curvatures, and shape changes arising from patterned lines on silicon wafers
    • Y.L. Shen, S. Suresh, and I.A. Blech Stresses, curvatures, and shape changes arising from patterned lines on silicon wafers J. Appl. Phys. 80 1996 1388 1398
    • (1996) J. Appl. Phys. , vol.80 , pp. 1388-1398
    • Shen, Y.L.1    Suresh, S.2    Blech, I.A.3
  • 12
    • 0000073841 scopus 로고
    • The tension of metallic films deposited by electrolysis
    • G.G. Stoney The tension of metallic films deposited by electrolysis Proc. R. Soc. Lond. A 82 1909 172 175
    • (1909) Proc. R. Soc. Lond. A , vol.82 , pp. 172-175
    • Stoney, G.G.1
  • 13
    • 0032644329 scopus 로고    scopus 로고
    • Thermoelastic analysis of periodic thin lines deposited on a substrate
    • A. Wikstrom, P. Gudmundson, and S. Suresh Thermoelastic analysis of periodic thin lines deposited on a substrate J. Mech. Phys. Solids 47 1999 1113 1130
    • (1999) J. Mech. Phys. Solids , vol.47 , pp. 1113-1130
    • Wikstrom, A.1    Gudmundson, P.2    Suresh, S.3
  • 14
    • 3242854332 scopus 로고    scopus 로고
    • Analysis of average thermal stresses in passivated metal interconnects
    • A. Wikstrom, P. Gudmundson, and S. Suresh Analysis of average thermal stresses in passivated metal interconnects J. Appl. Phys. 86 1999 6088 6095
    • (1999) J. Appl. Phys. , vol.86 , pp. 6088-6095
    • Wikstrom, A.1    Gudmundson, P.2    Suresh, S.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.