Stresses, curvatures, and shape changes arising from patterned lines on silicon wafers

Journal of Applied Physics

Volumn 80, Issue 3, 1996, Pages 1388-1398

  Shen, Y L ^a   Suresh, S ^a   Blech, I A ^a  

^a Massachusetts Institute of Technology Cambridge   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 3743109337     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.362938     Document Type: Article

References (28)

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