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Volumn 48, Issue 6, 2000, Pages 1159-1174

Substrate curvature due to thin film mismatch strain in the nonlinear deformation range

Author keywords

[No Author keywords available]

Indexed keywords

BIFURCATION (MATHEMATICS); BONDING; FINITE ELEMENT METHOD; MATHEMATICAL MODELS; PLASTIC DEFORMATION; RESIDUAL STRESSES; STRAIN; SUBSTRATES; THIN FILMS;

EID: 0033907470     PISSN: 00225096     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-5096(99)00070-8     Document Type: Article
Times cited : (209)

References (19)
  • 1
    • 0030141309 scopus 로고    scopus 로고
    • Small and large deformation of thick and thin film multi-layers: Effects of layer geometry, plasticity and compositional gradients
    • Finot M., Suresh S. Small and large deformation of thick and thin film multi-layers: effects of layer geometry, plasticity and compositional gradients. J. Mech. Phys. Solids. 44:1996;683-721.
    • (1996) J. Mech. Phys. Solids , vol.44 , pp. 683-721
    • Finot, M.1    Suresh, S.2
  • 2
    • 0002429638 scopus 로고
    • Principles and applications of wafer curvature techniques for stress measurement in thin films
    • In: Bravman, J.C., Nix, W.D., Barnett, D.M., Smith, D.A. (Eds.), (Mater. Res. Soc. Proc. 130, Pittsburgh, PA)
    • Flinn, P.A., 1989. Principles and applications of wafer curvature techniques for stress measurement in thin films. In: Bravman, J.C., Nix, W.D., Barnett, D.M., Smith, D.A. (Eds.), Thin Films: Stresses and Mechanical Properties (Mater. Res. Soc. Proc. 130, Pittsburgh, PA), pp. 41-51.
    • (1989) Thin Films: Stresses and Mechanical Properties , pp. 41-51
    • Flinn, P.A.1
  • 4
    • 0345473989 scopus 로고    scopus 로고
    • Kinetics of stress relaxation due to coherent island formation during Si8Ge2/Si epitaxial growth
    • Floro J.A., Chason E., Twesten R.D., Hwang R.Q., Freund L.B. Kinetics of stress relaxation due to coherent island formation during Si8Ge2/Si epitaxial growth. Physical Review Letters. 79:1997;3946-3949.
    • (1997) Physical Review Letters , vol.79 , pp. 3946-3949
    • Floro, J.A.1    Chason, E.2    Twesten, R.D.3    Hwang, R.Q.4    Freund, L.B.5
  • 6
    • 0030141232 scopus 로고    scopus 로고
    • Some elementary connections between curvature and mismatch strain in compositionally graded thin films
    • Freund L.B. Some elementary connections between curvature and mismatch strain in compositionally graded thin films. J. Mech. Phys. Solids. 44:1996;723-736.
    • (1996) J. Mech. Phys. Solids , vol.44 , pp. 723-736
    • Freund, L.B.1
  • 7
    • 0027656416 scopus 로고
    • The stress distribution and curvature of a general compositionally graded semiconductor layer
    • Freund L.B. The stress distribution and curvature of a general compositionally graded semiconductor layer. J. Crystal Growth. 132:1993;341-344.
    • (1993) J. Crystal Growth , vol.132 , pp. 341-344
    • Freund, L.B.1
  • 8
    • 0039394964 scopus 로고    scopus 로고
    • The mechanics of a free-standing strained film/compliant substrate system
    • In: Gerberich, W.W., Gao, H., Sundgren, J.E., Baker, S.P. (Eds.), (Mater. Res. Soc. Proc. 436, Pittsburgh, PA)
    • Freund, L.B., 1997. The mechanics of a free-standing strained film/compliant substrate system. In: Gerberich, W.W., Gao, H., Sundgren, J.E., Baker, S.P. (Eds.), Thin Films: Stresses and Mechanical Properties VI (Mater. Res. Soc. Proc. 436, Pittsburgh, PA), pp. 393-404.
    • (1997) Thin Films: Stresses and Mechanical Properties VI , pp. 393-404
    • Freund, L.B.1
  • 9
    • 0039394965 scopus 로고
    • The nonlinear boundary value problem of the buckled plate
    • Friedrichs K.O., Stoker J.J. The nonlinear boundary value problem of the buckled plate. Proc. Nat. Acad. Sci. 25:1939;535-540.
    • (1939) Proc. Nat. Acad. Sci. , vol.25 , pp. 535-540
    • Friedrichs, K.O.1    Stoker, J.J.2
  • 10
    • 85136544337 scopus 로고
    • Buckling of the circular plate beyond the critical thrust
    • Friedrichs K.O., Stoker J.J. Buckling of the circular plate beyond the critical thrust. J. Appl. Mech. 9:1942;A7-A14.
    • (1942) J. Appl. Mech. , vol.9
    • Friedrichs, K.O.1    Stoker, J.J.2
  • 11
    • 0020156712 scopus 로고
    • The room-temperature shape of four-layer unsymmetric cross-ply laminates
    • Hyer M.W. The room-temperature shape of four-layer unsymmetric cross-ply laminates. J. Compos. Mater. 16:1982;318-340.
    • (1982) J. Compos. Mater. , vol.16 , pp. 318-340
    • Hyer, M.W.1
  • 12
    • 0010180738 scopus 로고
    • Residual stresses in graded thick coatings
    • Kroupa F., Knesl Z., Valach J. Residual stresses in graded thick coatings. Acta Technica CSAV. 38:1993;29-74.
    • (1993) Acta Technica CSAV , vol.38 , pp. 29-74
    • Kroupa, F.1    Knesl, Z.2    Valach, J.3
  • 13
    • 0027609996 scopus 로고
    • Geometrically nonlinear stress-deflection relations for thin film/substrate systems
    • Masters C.B., Salamon N.J. Geometrically nonlinear stress-deflection relations for thin film/substrate systems. Int. J. Engrg. Sci. 31:1993;915-925.
    • (1993) Int. J. Engrg. Sci. , vol.31 , pp. 915-925
    • Masters, C.B.1    Salamon, N.J.2
  • 14
    • 0024766321 scopus 로고
    • Mechanical properties of thin films
    • Nix W.D. Mechanical properties of thin films. Metall. Trans. 20A:1989;2217-2245.
    • (1989) Metall. Trans , vol.20 , pp. 2217-2245
    • Nix, W.D.1
  • 15
    • 0032117941 scopus 로고    scopus 로고
    • Full field measurements of curvature using coherent gradient sensing - application to thin-film characterization
    • Rosakis A.J., Singh R.P., Tsuji Y., Kolawa E., Moore N.R. Full field measurements of curvature using coherent gradient sensing - application to thin-film characterization. Thin Solid Films. 325:1998;42-54.
    • (1998) Thin Solid Films , vol.325 , pp. 42-54
    • Rosakis, A.J.1    Singh, R.P.2    Tsuji, Y.3    Kolawa, E.4    Moore, N.R.5
  • 16
    • 0029255919 scopus 로고
    • Bifurcation in isotropic thin film/substrate plates
    • Salamon N.J., Masters C.B. Bifurcation in isotropic thin film/substrate plates. Int. J. Solids Structures. 32:1995;473-481.
    • (1995) Int. J. Solids Structures , vol.32 , pp. 473-481
    • Salamon, N.J.1    Masters, C.B.2
  • 17
    • 0000073841 scopus 로고
    • The tension of metallic films deposited by electrolysis
    • Stoney G.G. The tension of metallic films deposited by electrolysis. Proc. Roy. Soc. (London). A82:1909;172-175.
    • (1909) Proc. Roy. Soc. (London) , vol.82 , pp. 172-175
    • Stoney, G.G.1
  • 19
    • 77957208657 scopus 로고
    • Stability of a bimetallic disk
    • Wittrick W.H. Stability of a bimetallic disk. Quart. J. Appl. Math. 6:1953;15-26.
    • (1953) Quart. J. Appl. Math. , vol.6 , pp. 15-26
    • Wittrick, W.H.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.