SCOPUS 정보 검색 플랫폼

Chemical Vapor Deposition

Volumn 13, Issue 8, 2007, Pages 401-407

Alcohol-assisted CVD of silver using commercially available precursors

(5) Bahlawane, Naoufal a Premkumar, Peter Antony a Brechling, Armin a Reiss, Günter a Kohse Höinghaus, Katharina a

a BIELEFELD UNIVERSITY (Germany)

Author keywords

Electrical resistivity; Liquid delivery; Metallization; Pulsed spray evaporation CVD; Silver films

Indexed keywords

CHEMICAL VAPOR DEPOSITION; ELECTRIC RESISTANCE; FILM GROWTH; HIGH PERFORMANCE LIQUID CHROMATOGRAPHY; MASS SPECTROMETRY; METALLIC FILMS; ORGANIC POLYMERS; SALTS;

ELECTRICAL RESISTIVITY; LIQUID DELIVERY; METALLIZATION; PULSED-SPRAY-EVAPORATION CVD; SILVER FILMS;

SILVER;

EID: 38049149260 PISSN: 09481907 EISSN: 15213862 Source Type: Journal
DOI: 10.1002/cvde.200706610 Document Type: Article

Times cited : (23)

References (42)

1
- 4644368968
- 2nd Ed.,Wiley-VCH, Weinheim, Germany
- K. Welzig, C. M. Schneider, Metal Based Thin Films for Electronics, 2nd Ed.,Wiley-VCH, Weinheim, Germany 2006.
- (2006) Metal Based Thin Films for Electronics
- Welzig, K.¹ Schneider, C.M.²

2
- 9544236212
- L. Gao, P. Härter, C. Linsmeier, J. Gstöttner, R. Emling, D. Schmitt-Landsiedel, Mat. Sci. Semicond. Process. 2004, 7, 331.
- (2004) Mat. Sci. Semicond. Process , vol.7 , pp. 331
- Gao, L.¹ Härter, P.² Linsmeier, C.³ Gstöttner, J.⁴ Emling, R.⁵ Schmitt-Landsiedel, D.⁶

3
- 0000179978
- M. Hauder, J. Gstöttner, W. Hansch, D. Schmitt-Landsiedel, Appl. Phys. Lett. 2001, 78, 838.
- (2001) Appl. Phys. Lett , vol.78 , pp. 838
- Hauder, M.¹ Gstöttner, J.² Hansch, W.³ Schmitt-Landsiedel, D.⁴

4
- 28044454763
- R. Emling, G. Schindler, G. Steinlesberger, M. Engelhardt, L. Gao, D. Schmitt-Landsiedel, Microelectron. Eng. 2005, 82, 273.
- (2005) Microelectron. Eng , vol.82 , pp. 273
- Emling, R.¹ Schindler, G.² Steinlesberger, G.³ Engelhardt, M.⁴ Gao, L.⁵ Schmitt-Landsiedel, D.⁶

5
- 30844454068
- E. Ozbay, Science 2006, 311, 189.
- (2006) Science , vol.311 , pp. 189
- Ozbay, E.¹

6
- 8344221989
- P. Andrew, W. L. Barnes, Science 2004, 306, 1002.
- (2004) Science , vol.306 , pp. 1002
- Andrew, P.¹ Barnes, W.L.²

7
- 22744453090
- T. D. Neal, K. Okamoto, A. Scherer, Opt. Expr. 2005, 13, 5522.
- (2005) Opt. Expr , vol.13 , pp. 5522
- Neal, T.D.¹ Okamoto, K.² Scherer, A.³

8
- 33748492972
- W. Leng, A. Yasseri, S. Sharma, Z. Li, H. Y. Woo, D. Vak, G. C. Bazan, A. M. Kelley, Anal. Chem. 2006, 78, 6279.
- (2006) Anal. Chem , vol.78 , pp. 6279
- Leng, W.¹ Yasseri, A.² Sharma, S.³ Li, Z.⁴ Woo, H.Y.⁵ Vak, D.⁶ Bazan, G.C.⁷ Kelley, A.M.⁸

9
- 0001258638
- Z. Yuan, N. H. Dryden, J. J. Vittal, R. J.Puddephatt, Can. J. Chem. 1994, 72, 1605.
- (1994) Can. J. Chem , vol.72 , pp. 1605
- Yuan, Z.¹ Dryden, N.H.² Vittal, J.J.³ Puddephatt, R.J.⁴

10
- 0035507803
- D. P. Dowling, K. Donnelly, M. L. McConnell, R. Eloy, M. N. Arnaud, Thin Solid Films 2001, 398-399, 602.
- (2001) Thin Solid Films , vol.398-399 , pp. 602
- Dowling, D.P.¹ Donnelly, K.² McConnell, M.L.³ Eloy, R.⁴ Arnaud, M.N.⁵

11
- 0027617576
- S. Bauer, S. Bauer-Gorgonea, W. Becker, R. Fettig, B. Ploss, W. Ruppel, W. Von Münch, Sens. Actuators A 1993, 37-38, 497.
- (1993) Sens. Actuators A , vol.37-38 , pp. 497
- Bauer, S.¹ Bauer-Gorgonea, S.² Becker, W.³ Fettig, R.⁴ Ploss, B.⁵ Ruppel, W.⁶ Von Münch, W.⁷

12
- 33747202169
- V. V. Levenets, R. E. Amaya, N. G. Tarr, T. J. Smy, Solid-State Electron. 2006, 50, 1389.
- (2006) Solid-State Electron , vol.50 , pp. 1389
- Levenets, V.V.¹ Amaya, R.E.² Tarr, N.G.³ Smy, T.J.⁴

13
- 33645413652
- M. S. Ghattas, J. Mol. Catal. A 2006, 248, 175.
- (2006) J. Mol. Catal. A , vol.248 , pp. 175
- Ghattas, M.S.¹

14
- 0242391263
- L. F. De Mello, F. B. Noronha, M. Schmal, J. Catal. 2003, 220, 358.
- (2003) J. Catal , vol.220 , pp. 358
- De Mello, L.F.¹ Noronha, F.B.² Schmal, M.³

15
- 0000371211
- K. M. Chi, K. H. Chen, H. C. Lin, K. J. Lin, Polyhedron 1997, 13, 2147.
- (1997) Polyhedron , vol.13 , pp. 2147
- Chi, K.M.¹ Chen, K.H.² Lin, H.C.³ Lin, K.J.⁴

16
- 0037196518
- D. A. Edwards, R. M. Harker, M. F. Mahon, K. C. Molloy, Inorg. Acta 2002, 328, 134.
- (2002) Inorg. Acta , vol.328 , pp. 134
- Edwards, D.A.¹ Harker, R.M.² Mahon, M.F.³ Molloy, K.C.⁴

17
- 28044438936
- L. Gao, P. Härter, C. Linsmeier, A. Wiltner, R. Emling, D. Schmitt-Landsiedel, Microelectron. Eng. 2005, 82, 296.
- (2005) Microelectron. Eng , vol.82 , pp. 296
- Gao, L.¹ Härter, P.² Linsmeier, C.³ Wiltner, A.⁴ Emling, R.⁵ Schmitt-Landsiedel, D.⁶

18
- 54949149021
- US Patent 09/447974
- J. T.Welch, S. C. Ngo, K. K. Banger, US Patent 09/447974 1999.
- (1999)
- Welch, J.T.¹ Ngo, S.C.² Banger, K.K.³

19
- 18744387271
- T. Haase, K. Kohse-Höinghaus, N. Bahlawane, P. Djiele, A. Jakob, H. Lang, Chem. Vap. Deposition 2005, 11, 195.
- (2005) Chem. Vap. Deposition , vol.11 , pp. 195
- Haase, T.¹ Kohse-Höinghaus, K.² Bahlawane, N.³ Djiele, P.⁴ Jakob, A.⁵ Lang, H.⁶

20
- 27644535493
- A. Grodzicki, I. Lakomska, P. Piszczek, I. Szymanska, E. Szlyk, Coord. Chem. Rev. 2005, 249, 2232.
- (2005) Coord. Chem. Rev , vol.249 , pp. 2232
- Grodzicki, A.¹ Lakomska, I.² Piszczek, P.³ Szymanska, I.⁴ Szlyk, E.⁵

21
- 0037335704
- D. A. Edwards, M. F. Mahon, K. C. Molloy, V. Ogrodnik, J. Mater. Chem. 2003, 13, 563.
- (2003) J. Mater. Chem , vol.13 , pp. 563
- Edwards, D.A.¹ Mahon, M.F.² Molloy, K.C.³ Ogrodnik, V.⁴

22
- 33744758317
- B. D. Fahlman, Curr. Org. Chem. 2006, 10, 1021.
- (2006) Curr. Org. Chem , vol.10 , pp. 1021
- Fahlman, B.D.¹

23
- 0028523514
- C. Xu, M. J. Hampden-Smith, T. T. Kodas, Adv. Mater. 1994, 6, 746.
- (1994) Adv. Mater , vol.6 , pp. 746
- Xu, C.¹ Hampden-Smith, M.J.² Kodas, T.T.³

24
- 0031077444
- S. Ayyappan, R. S. Gopalan, G. N. Subbanna, C. N. R. Rao, J. Mater. Res. 1997, 12, 398.
- (1997) J. Mater. Res , vol.12 , pp. 398
- Ayyappan, S.¹ Gopalan, R.S.² Subbanna, G.N.³ Rao, C.N.R.⁴

25
- 1942532038
- T. Yamamoto, Y. Wada, T. Sakata, H. Mori, M. Goto, S. Hibino, S. Yanagida, Chem. Lett. 2004, 33, 158.
- (2004) Chem. Lett , vol.33 , pp. 158
- Yamamoto, T.¹ Wada, Y.² Sakata, T.³ Mori, H.⁴ Goto, M.⁵ Hibino, S.⁶ Yanagida, S.⁷

26
- 33748930793
- A. Hozumi, M. Inagaki, N. Shirahata, Surf. Sci. 2006, 600, 4044.
- (2006) Surf. Sci , vol.600 , pp. 4044
- Hozumi, A.¹ Inagaki, M.² Shirahata, N.³

27
- 17044379030
- P. D. Godbole, A. Mitra, R. Pasricha, A. B. Mandale, K. R. Patil, Mater. Lett. 2005, 59, 1958.
- (2005) Mater. Lett , vol.59 , pp. 1958
- Godbole, P.D.¹ Mitra, A.² Pasricha, R.³ Mandale, A.B.⁴ Patil, K.R.⁵

28
- 33645036560
- I. C. Estrada-Raygoza, M. Stelo-Lerma, R. Ramirez-Bon, J. Phys. Chem. Solids 2006, 67, 782.
- (2006) J. Phys. Chem. Solids , vol.67 , pp. 782
- Estrada-Raygoza, I.C.¹ Stelo-Lerma, M.² Ramirez-Bon, R.³

29
- 0042698460
- J. H. Kim, V. I. Babushok, T. A. Germer, G. W. Mulholland, S. H. Ehrman, J. Mater. Res. 2003, 18, 1614.
- (2003) J. Mater. Res , vol.18 , pp. 1614
- Kim, J.H.¹ Babushok, V.I.² Germer, T.A.³ Mulholland, G.W.⁴ Ehrman, S.H.⁵

30
- 0001615833
- A. Bailey, T. S. Corbitt, M. J. Hampden-Smith, E. N. Duesler, T. T. Kodas, Polyhedron 1993, 12, 1785.
- (1993) Polyhedron , vol.12 , pp. 1785
- Bailey, A.¹ Corbitt, T.S.² Hampden-Smith, M.J.³ Duesler, E.N.⁴ Kodas, T.T.⁵

31
- 0035273005
- E. T. Eisenbraun, A. Klaver, Z. Patel, G. Nuesca, A. E. Kaloyeros, J. Vac. Sci. Technol. B 2001, 19, 585.
- (2001) J. Vac. Sci. Technol. B , vol.19 , pp. 585
- Eisenbraun, E.T.¹ Klaver, A.² Patel, Z.³ Nuesca, G.⁴ Kaloyeros, A.E.⁵

32
- 0036608722
- S. C. Ngo, K. K. Banger, P. J. Toscano, J. T. Welch, Polyhedron 2002, 21, 1289.
- (2002) Polyhedron , vol.21 , pp. 1289
- Ngo, S.C.¹ Banger, K.K.² Toscano, P.J.³ Welch, J.T.⁴

33
- 85012535380
- H.-S. Kim, K.-L. Lee, S.-G. Kim, Aerosol Sci. Technol. 2006, 40, 536.
- (2006) Aerosol Sci. Technol , vol.40 , pp. 536
- Kim, H.-S.¹ Lee, K.-L.² Kim, S.-G.³

34
- 0035533934
- Y. Dong,W.-L. Dai, J.-L. Li, J.-F. Deng, Chem. Lett. 2001, 30, 534.
- (2001) Chem. Lett , vol.30 , pp. 534
- Dong, Y.¹ Dai, W.-L.² Li, J.-L.³ Deng, J.-F.⁴

35
- 0017956563
- F.Warkusz, J. Phys. D 1978, 11, 689.
- (1978) J. Phys. D , vol.11 , pp. 689
- Warkusz, F.¹

36
- 0346644175
- K. Narayandas, M. Radhakrishnan, C. Balasubramanian, Thin Solid Films 1980, 67, 357.
- (1980) Thin Solid Films , vol.67 , pp. 357
- Narayandas, K.¹ Radhakrishnan, M.² Balasubramanian, C.³

37
- 0026720765
- X. Xu, C. M. Friend, Surf. Sci. 1992, 260, 14.
- (1992) Surf. Sci , vol.260 , pp. 14
- Xu, X.¹ Friend, C.M.²

38
- 0000292223
- M. K. Weldon, C. M. Friend, Chem. Rev. 1996, 96, 1391.
- (1996) Chem. Rev , vol.96 , pp. 1391
- Weldon, M.K.¹ Friend, C.M.²

39
- 0346907162
- F. Zaera, Catal. Lett. 2003, 91, 1.
- (2003) Catal. Lett , vol.91 , pp. 1
- Zaera, F.¹

40
- 33748583758
- M. K. Rajumon, M. W. Roberts, F. Wang, P. B. Wells, J. Chem. Soc. Faraday Trans. 1998, 94, 3699.
- (1998) J. Chem. Soc. Faraday Trans , vol.94 , pp. 3699
- Rajumon, M.K.¹ Roberts, M.W.² Wang, F.³ Wells, P.B.⁴

41
- 0036883426
- W. X. Huang, J. M. White, Catal. Lett. 2002, 84, 143.
- (2002) Catal. Lett , vol.84 , pp. 143
- Huang, W.X.¹ White, J.M.²

42
- 0001806583
- E. A. Carter, W. A. Goddard III, J. Catal. 1988, 112, 80.
- (1988) J. Catal , vol.112 , pp. 80
- Carter, E.A.¹ Goddard III, W.A.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.