Design and fabrication of a micro PZT cantilever array actuator for applications in fluidic systems

Journal of Mechanical Science and Technology

Volumn 19, Issue 8, 2005, Pages 1544-1553

  Kim, Hyonse ^a   In, Chihyun ^b   Yoon, Gilho ^c   Kim, Jongwon ^a  

^a Seoul National University   (South Korea)

^b Daewoo Electronics Co   (South Korea)

^c TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

Author keywords

Micro Cantilevers Array; Micro Fluidic System; PZT Film

Indexed keywords

EID: 33644502856     PISSN: 1738494X     EISSN: None     Source Type: Journal    
DOI: 10.1007/BF03023932     Document Type: Article

References (14)

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