Dual-wavelength vertical scanning low-coherence interferometric microscope

Applied Optics

Volumn 46, Issue 29, 2007, Pages 7141-7148

  Niehues, Jan ^a   Lehmann, Peter ^b   Bobey, Klaus ^a  

^a UNIVERSITY OF APPLIED SCIENCES AND ARTS   (Germany)

^b Mahr GmbH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFRACTION; ERROR DETECTION; INTERFEROMETRY; LIGHT EMISSION; LIGHT EMITTING DIODES; SIGNAL ANALYSIS;

MEASURED TOPOGRAPHY; SYSTEMATIC MEASURING ERRORS; WHITE LIGHT INTERFEROMETRY;

WAVELENGTH;

EID: 37549038630     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.46.007141     Document Type: Article

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