Systematic effects in coherence peak and phase evaluation of signals obtained with a vertical scanning white-light Mirau interferometer

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6188, Issue , 2006, Pages

  Lehmann, Peter ^a  

^a Mahr GmbH   (Germany)

Author keywords

Coherence peak; Dispersion; Mirau interferometer; Optical profilometry; Phase evaluation; Surface slope; White light interferometry

Indexed keywords

COST EFFECTIVENESS; DISPERSION (WAVES); LIGHT INTERFERENCE; MEASUREMENT THEORY; ROBUSTNESS (CONTROL SYSTEMS); SCANNING; SURFACE ROUGHNESS;

COHERENCE PEAK; MIRAU INTERFEROMETER; OPTICAL PROFILOMETRY; PHASE EVALUATION; SUBNANOMETER RESOLUTION; SURFACE SLOPE; WHITE-LIGHT INTERFEROMETRY;

INTERFEROMETERS;

EID: 33746699652     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.660892     Document Type: Conference Paper

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