Analytical model of a gas phase field ionization source

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 23, Issue 6, 2005, Pages 2816-2820

  Liu, Xuefeng ^a   Orloff, Jon ^a  

^a The Institute for Research in Electronics and Applied Physics   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EMITTER SHAPES; FOCUSED ION BEAM TECHNOLOGY; GAS PHASE FIELD IONIZATION SOURCES (GFIS); LIQUID METAL ION SOURCES (LMIS);

FOCUSING; INERT GASES; ION BEAMS; IONIZATION; LIGHT EMISSION; LIQUID METALS; MATHEMATICAL MODELS;

ION SOURCES;

EID: 29044432728     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2127946     Document Type: Article

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