Control of the thickness distribution of evaporated functional electroceramic NTC thermistor thin films

Journal of Materials Processing Technology

Volumn 199, Issue 1, 2008, Pages 412-416

  Schmidt, R ^a   Parlak, M ^a   Brinkman, A W ^a  

^a DURHAM UNIVERSITY   (United Kingdom)

Author keywords

Electroceramics; Low rate electron beam evaporation; NTC Thermistors; Thickness distribution

Indexed keywords

ELECTRON ABSORPTION; EVAPORATION; FILM THICKNESS; MATHEMATICAL MODELS; PARAMETER ESTIMATION; PROFILOMETRY; THIN FILMS;

ALPHA STEP STYLUS PROFILEOMETER; ELECTROCERAMICS; NTC THERMISTORS; THICKNESS DISTRIBUTION;

THERMISTORS;

EID: 37549029203     PISSN: 09240136     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jmatprotec.2007.08.014     Document Type: Article

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