Experimental and theoretical studies of coating thickness distributions obtained from high rate electron beam evaporation sources

Thin Solid Films

Volumn 293, Issue 1-2, 1997, Pages 124-132

  Piot, O ^a   Malaurie, A ^a   Machet, J ^a  

^a UNIVERSITY OF LIMOGES   (France)

Author keywords

Deposition process; Evaporation; Metals; Physical vapour deposition (PVD)

Indexed keywords

COMPUTER SIMULATION; DENSITY (SPECIFIC GRAVITY); ELECTRON BEAMS; EVAPORATION; FILM GROWTH; MATHEMATICAL MODELS; MONTE CARLO METHODS; SUBSTRATES; VAPOR DEPOSITION;

ATOMIC EMISSIONS; PHYSICAL VAPOR DEPOSITION (PVD); SPACE DISTRIBUTIONS;

THIN FILMS;

EID: 0030643252     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(96)09123-7     Document Type: Article

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