A spatial distribution study of a beam vapour emitted by electron-beam-heated evaporation sources

Journal of Physics D: Applied Physics

Volumn 29, Issue 1, 1996, Pages 218-224

  Chaleix, D ^a   Choquet, P ^a   Bessaudou, A ^b   Frugier, L ^b   Machet, J ^b  

^a IRSID   (France)

^b UNIVERSITY OF LIMOGES   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMS; ELECTRON BEAMS; EVAPORATION; METALLIC FILMS; VACUUM APPLICATIONS;

BEAM VAPOUR; COLLISION REGION; ELECTRON BEAM HEATED EVAPORATION SOURCE; SPATIAL DISTRIBUTION;

VAPORS;

EID: 0029770619     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/29/1/032     Document Type: Article

References (12)

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