Integrated hybrid micro/nano-machining

Proceedings of the ASME International Manufacturing Science and Engineering Conference 2007, MSEC2007

Volumn , Issue , 2007, Pages 197-210

  Rahman, M ^a   Asad, A B M A ^a   Masaki, Takeshi ^b   Wong, Y S ^a   Lim, H S ^c  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

^b TOHOKU UNIVERSITY   (Japan)

^c Mikrotools Pte Ltd   (Singapore)

Author keywords

Micro EDM; Micro grinding; Micro turning; Micromachining

Indexed keywords

MICRO-EDM; MICRO-GRINDING; MICRO-TURNING;

INDUSTRIAL APPLICATIONS; MEMS; PRODUCT DEVELOPMENT; SEMICONDUCTOR DEVICE MANUFACTURE; SURFACE TREATMENT; TECHNOLOGY TRANSFER;

MICROMACHINING;

EID: 37349107766     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/MSEC2007-31009     Document Type: Conference Paper

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