Oxidation behavior of TiN/ZrN multilayers annealed in air

Thin Solid Films

Volumn 516, Issue 6, 2008, Pages 1025-1028

  Xu, X M ^a   Wang, J ^a   Zhang, Q Y ^a  

^a DALIAN UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

Interface; Layer by layer; Oxidation behavior; TiN ZrN multilayers

Indexed keywords

ANNEALING; MAGNETRON SPUTTERING; OXIDATION; TITANIUM NITRIDE; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS;

ANNEALED MULTILAYERS; OXIDATION BEHAVIOR; RADIO FREQUENCY;

MULTILAYERS;

EID: 37349069325     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2007.07.007     Document Type: Article

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