SCOPUS 정보 검색 플랫폼

Volumn 201, Issue 9-11 SPEC. ISS., 2007, Pages 5582-5586

Effect of modulation structure on the growth behavior and mechanical properties of TiN/ZrN multilayers

Author keywords

Growth behavior; Mechanical properties; TiN ZrN multilayer

Indexed keywords

ELASTIC MODULI; HARDNESS; INDENTATION; MAGNETRON SPUTTERING; MECHANICAL PROPERTIES; TITANIUM COMPOUNDS; ZIRCONIUM COMPOUNDS;

GROWTH BEHAVIOR; MODULATION STRUCTURE; NANO-INDENTATION MEASUREMENT;

MULTILAYERS;

ELASTIC MODULI; HARDNESS; INDENTATION; MAGNETRON SPUTTERING; MECHANICAL PROPERTIES; MULTILAYERS; TITANIUM COMPOUNDS; ZIRCONIUM COMPOUNDS;

EID: 33846539064 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/j.surfcoat.2006.07.132 Document Type: Article

Times cited : (47)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.