SCOPUS 정보 검색 플랫폼

Volumn 25, Issue 6, 2007, Pages 2068-2071

Fabrication of spiral-phase diffractive elements using scanning-electron- beam lithography

Author keywords

[No Author keywords available]

Indexed keywords

BINARY SPIRAL ZONE PLATES; SCANNING ELECTRON BEAM LITHOGRAPHY;

PHOTORESISTORS; SCANNING ELECTRON MICROSCOPY;

ELECTRON BEAM LITHOGRAPHY;

EID: 37149018005 PISSN: 10711023 EISSN: None Source Type: Journal
DOI: 10.1116/1.2806961 Document Type: Article

Times cited : (23)

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