Focused ion beam iodine-enhanced etching of high aspect ratio holes in InP photonic crystals

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 25, Issue 6, 2007, Pages 2175-2179

  Callegari, V ^a,b   Nellen, P M ^a   Kaufmann, J ^a   Strasser, P ^b   Robin, F ^b   Sennhauser, U ^a  

^a SWISS FEDERAL LABORATORIES FOR MATERIALS SCIENCE AND TECHNOLOGY   (Switzerland)

^b ETH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; FOCUSED ION BEAMS; GALLIUM; INDIUM PHOSPHIDE; INDUCTIVELY COUPLED PLASMA; IODINE; RAPID PROTOTYPING; REACTIVE ION ETCHING; SURFACE ROUGHNESS;

AMORPHOUS LAYERS; IODINE-ENHANCED ETCHING; PHYSICAL SPUTTERING;

PHOTONIC CRYSTALS;

EID: 37149000009     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2804607     Document Type: Article

References (15)

1. J. D. Joannopoulos, R. D. Meade, and J. N. Winn, Photonic Crystals-Molding the Flow of Light (Princeton University Press, Princeton, NJ, 1995).
2. P. Strasser, R. Wüest, F. Robin, D. Erni, and H. Jäckel, J. Vac. Sci. Technol. B 1071-1023 10.1116/1.2712198 25, 387 (2007).
3. P. M. Nellen, P. Strasser, V. Callegari, R. Wüest, D. Erni, and F. Robin, Microelectron. Eng. 84, 1244 (2007).
4. J. Dieleman, F. H. M. Sanders, A. W. Kolfschoten, P. C. Zalm, A. E. Devries, and A. Haring, J. Vac. Sci. Technol. B 1071-1023 10.1116/1.582997 3, 1384 (1985).
5. S. Rubanov and P. R. Munroe, Microsc. Microanal. 11, 446 (2005). 1431-9276
6. V. Callegari, P. M. Nellen, T. Yang, R. Hauert, U. Müller, F. Hernández-Ramírez, and U. Sennhauser, Appl. Surf. Sci. 253, 8969 (2007).
7. B. Brunetti, A. Giustini, and V. Piacente, J. Chem. Thermodyn. 29, 239 (1997). 0021-9614
8. T. N. Guliev, Izv. Vys. Ucheb. Zaved, Khim. Khim. Tekhnol. 34, 7 (1991).
9. R. F. C. Farrow, J. Phys. D 0022-3727 10.1088/0022-3727/7/17/318 7, 2436 (1974).
10. J. S. Yu and Y. T. Lee, Semicond. Sci. Technol. 0268-1242 10.1088/0268-1242/17/3/309 17, 230 (2002).
11. J. F. Ziegler, J. P. Biersack, and U. Littmark, The Stopping and Range of Ions in Solids (Pergamon, New York, 1985); www.srim.org.
12. J. F. Ziegler, J. P. Biersack, and U. Littmark, The Stopping and Range of Ions in Solids (Pergamon, New York, 1985); www.srim.org.
13. R. Menzel, K. Gartner, W. Wesch, and H. Hobert, J. Appl. Phys. 0021-8979 10.1063/1.1319168 88, 5658 (2000).
14. W. Yu, J. L. Sullivan, S. O. Saied, and G. A. C. Jones, Nucl. Instrum. Methods Phys. Res. B 0168-583X 10.1016/S0168-583X(97)00599-5 135, 250 (1998).
15. R. Ferrini, D. Leuenberger, M. Mulot, M. Qiu, J. Moosburger, M. A. Kamp, A. Forchel, S. Anand, and R. Houdŕ, IEEE J. Quantum Electron. 0018-9197 10.1109/JQE.2002.1017588 38, 786 (2002).