Stress measurements in thermal loaded (Ti, Al) N hard coatings

Surface and Coatings Technology

Volumn 142-144, Issue , 2001, Pages 861-867

  Gobel Th ^a   Menzel, S ^a   Hecker, M ^a   Bruckner W ^a   Wetzig, K ^a   Genzel, Ch ^b  

^a IFW DRESDEN   (Germany)

^b HAHN MEITNER INSTITUT   (Germany)

Author keywords

(Ti, Al)N thin films; Scattering vector method; Stress measurement; Substrate curvature method

Indexed keywords

ANNEALING; CRACK INITIATION; DELAMINATION; LASER APPLICATIONS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; RESIDUAL STRESSES; TENSILE STRESS; THERMAL LOAD; THERMAL STRESS; X RAY DIFFRACTION ANALYSIS;

HARD COATINGS;

INORGANIC COATINGS;

COATING; FILM; HARDNESS; MEASUREMENT METHOD; STRESS;

EID: 0035387970     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(01)01102-1     Document Type: Article

References (22)