Microstructures of (Ti,Cr,Al,Si)N films synthesized by cathodic arc method

Surface and Coatings Technology

Volumn 201, Issue 9-11 SPEC. ISS., 2007, Pages 5477-5480

  Ichijo, K ^a   Hasegawa, H ^b   Suzuki, T ^a  

^a KEIO UNIVERSITY   (Japan)

^b OKAYAMA UNIVERSITY   (Japan)

Author keywords

(Ti,Cr,Al,Si)N; Microhardness; Microstructure

Indexed keywords

CRYSTAL MICROSTRUCTURE; GRAIN SIZE AND SHAPE; MICROHARDNESS; PHASE TRANSITIONS; SUBSTRATES; SYNTHESIS (CHEMICAL); TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS;

CATHODIC ARC METHOD; HEXAGONAL STRUCTURE;

NITRIDES;

CRYSTAL MICROSTRUCTURE; GRAIN SIZE AND SHAPE; MICROHARDNESS; NITRIDES; PHASE TRANSITIONS; SUBSTRATES; SYNTHESIS (CHEMICAL); TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS;

EID: 33846514590     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2006.07.016     Document Type: Article

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