Determining substrate temperature in an AC inverted cylindrical magnetron sputtering PVD system

Surface and Coatings Technology

Volumn 202, Issue 8, 2008, Pages 1564-1567

  Cloud, A N ^a   Aryasomayajula, A ^a   Bhat, D G ^a,b   Gordon, M H ^a  

^a UNIVERSITY OF ARKANSAS   (United States)

^b NATIONAL SCIENCE FOUNDATION   (United States)

Author keywords

Alumina films; Magnetron sputtering; Substrate temperature measurement

Indexed keywords

ALUMINA; MAGNETRON SPUTTERING; SUBSTRATES; TEMPERATURE MEASUREMENT;

DUAL TARGET INVERTED CYLINDRICAL MAGNETRON SPUTTERING; ISOFLUX SYSTEM;

PHYSICAL VAPOR DEPOSITION;

ALUMINA; MAGNETRON SPUTTERING; PHYSICAL VAPOR DEPOSITION; SUBSTRATES; TEMPERATURE MEASUREMENT;

EID: 37049017637     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2007.07.007     Document Type: Article

References (20)

1. Gitzen W.H. Alumina as a Ceramic Material (1970), American Ceramic Society, Columbus
2. Ruppi S. Int. J. Refract. Met. Hard Mater. (2005)
3. Cremer R., Witthaut M., Neuschütz D., Erkens G., Leyendecker T., and Feldhege M. Surf. Coat. Technol. 120-121 (1999) 213
4. Leushake U., Krell T., Schulz U., Peters M., Kaysser W.A., and Rabin B.H. Surf. Coat. Technol. 94-95 (1997) 131
5. Mellali M., Fauchais P., and Grimaud A. Surf. Coat. Technol. 81 (1996) 275
6. Sobiecki J.R., Ewertowshi J., Babul T., and Wierzchon T. Surf. Coat. Technol. 180-181 (2004) 556
7. Chen Y., Ai X., Huang C., and Wang B. Mater. Sci. Eng., A Struct. Mater.: Prop. Microstruct. Process. 288 (2000) 19
8. Gottmann J., and Kreutz E.W. Surf. Coat. Technol. 116-119 (1999) 1189
9. Kohara T., Tamagaki H., Ikari Y., and Fujii H. Surf. Coat. Technol. 185 (2004) 166
10. Belkind A., Freilich A., Song G., Zhao Z., Scholl R., and Bixon E. Surf. Coat. Technol. 174-175 (2003) 88
11. Zywitzki O., Hoetzsch G., Fietzke F., and Goedicke K. Surf. Coat. Technol. 82 (1996) 169
12. Zywitzki O., and Hoetzsch G. Surf. Coat. Technol. 86-87 (1996) 640
13. Zywitzki O., and Hoetzsch G. Surf. Coat. Technol. 94-95 (1997) 303
14. Wang J., Yu Y.-H., Lee S.C., and Chung Y.-W. Surf. Coat. Technol. 146-147 (2001) 189
15. Kyrylov O., Cremer R., and Neuschütz D. Surf. Coat. Technol. 163-164 (2003) 203
16. Tempil, Inc. 23 Feb 2007 .
17. Glocker D.A., Romach M.M., and Lindberg V.W. Surf. Coat. Technol. 146-147 (2001) 457
18. Khanna A., and Bhat D.G. Surf. Coat. Technol. 201 (2006) 168
19. "Stainless Steel- Grade 316- Properties, Fabrication and Applications." The A to Z of Materials. 2007. The A to Z of Materials. 23 Feb 2007 .
20. Transactions in Measurement and Control. 2nd Edition. Omega vol. 1 (1998) 72