High-density ordered triangular Si nanopillars with sharp tips and varied slopes: One-step fabrication and excellent field emission properties

Nanotechnology

Volumn 18, Issue 50, 2007, Pages

  Hsieh, Ho Yen ^a   Huang, Sheng Huang ^a   Liao, Kao Fen ^a   Su, Sheng Kai ^a   Lai, Chih Huang ^a   Chen, Lih Juann ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; FIELD EMISSION; LITHOGRAPHY; REACTIVE ION ETCHING; SILICON; THERMODYNAMIC STABILITY;

NANODOT ARRAYS; NANOPILLARS;

NANOSTRUCTURED MATERIALS;

NANOMATERIAL; NANOSPHERE; QUANTUM DOT; SILICON;

ARTICLE; COATED PARTICLE; MATERIAL COATING; MOLECULAR STABILITY; NANOFABRICATION; PRIORITY JOURNAL; SCANNING ELECTRON MICROSCOPY; THERMOSTABILITY;

EID: 36749044413     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/18/50/505305     Document Type: Article

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