Cat-CVD SiN passivation films for OLEDs and packaging

Thin Solid Films

Volumn 516, Issue 5, 2008, Pages 553-557

  Heya, Akira ^a   Minamikawa, Toshiharu ^b   Niki, Toshikazu ^c   Minami, Shigehira ^c   Masuda, Atsushi ^d   Umemoto, Hironobu ^d   Matsuo, Naoto ^a   Matsumura, Hideki ^d  

^a UNIVERSITY OF HYOGO   (Japan)

^b INDUSTRIAL RESEARCH INSTITUTE OF ISHIKAWA   (Japan)

^c Ishikawa Seisakusho Ltd   (Japan)

^d JAPAN ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY   (Japan)

Author keywords

Barrier film; Ca corrosion test; Cat CVD; Organic light emitting diode; Passivation; Roll to roll; Silicon nitride; Water vapor transmission rate

Indexed keywords

CHEMICAL VAPOR DEPOSITION; ELECTRONICS PACKAGING; ORGANIC LIGHT EMITTING DIODES (OLED); PASSIVATION; SILICON NITRIDE;

BARRIER FILMS; WATER VAPOR TRANSMISSION RATE;

THIN FILMS;

EID: 36749007744     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2007.06.220     Document Type: Article

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