Non-destructive complex permittivity measurement of low permittivity thin film materials

Measurement Science and Technology

Volumn 18, Issue 9, 2007, Pages 2869-2877

  Easton, C D ^a   Jacob, M V ^a   Krupka, J ^b  

^a JAMES COOK UNIVERSITY   (Australia)

^b WARSAW UNIVERSITY OF TECHNOLOGY   (Poland)

Author keywords

Dielectric measurements; Thin polymer films

Indexed keywords

NONDESTRUCTIVE EXAMINATION; RESONATORS; SUBSTRATES; THIN FILMS;

DIELECTRIC MEASUREMENTS; THIN POLYMER FILMS;

PERMITTIVITY;

NONDESTRUCTIVE EXAMINATION; PERMITTIVITY; RESONATORS; SUBSTRATES; THIN FILMS;

EID: 36448971294     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/18/9/016     Document Type: Article

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