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Electronics Letters
Volumn 43, Issue 24, 2007, Pages 1356-1357
High cleanliness of portable clean-unit-box to unite clean-unit system platforms (CUSPs) and CUSP units
Author keywords

[No Author keywords available]
Indexed keywords

ENGINEERING RESEARCH; PROBLEM SOLVING; WAFER BONDING;
EID: 36448963159     PISSN: 00135194     EISSN: None     Source Type: Journal    
DOI: 10.1049/el:20072096     Document Type: Article
Times cited : (2)
References (10)
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    • Current-injection induced dislocation networks in II-VI laser diodes: Bottom-up structures emerging in top-down systems
    • 10.1049/el:20046226 0013-5194
    • Ishibashi, A., and Kondo, K.: ' Current-injection induced dislocation networks in II-VI laser diodes: bottom-up structures emerging in top-down systems ', Electron. Lett., 2004, 40, p. 1268-1269 10.1049/el:20046226 0013-5194
    • (2004) Electron. Lett. , vol.40 , pp. 1268-1269
    • Ishibashi, A.1    Kondo, K.2
  • 5
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    • Connected box-units based compact highly clean environment for cross-disciplinary experiments platform
    • 10.1049/el:20051053 0013-5194
    • Ishibashi, A., Kaiju, H., Yamagata, Y., and Kawaguchi, N.: ' Connected box-units based compact highly clean environment for cross-disciplinary experiments platform ', Electron. Lett., 2005, 41, p. 735 10.1049/el:20051053 0013-5194
    • (2005) Electron. Lett. , vol.41 , pp. 735
    • Ishibashi, A.1    Kaiju, H.2    Yamagata, Y.3    Kawaguchi, N.4
  • 6
    • 26444606380 scopus 로고    scopus 로고
    • Study of very low airborne particle count in clean-unit system platform
    • 10.1063/1.2006387 0034-6748
    • Kaiju, H., Kawaguchi, N., and Ishibashi, A.: ' Study of very low airborne particle count in clean-unit system platform ', Rev. Sci. Instrum., 2005, 76, p. 085111-085113 10.1063/1.2006387 0034-6748
    • (2005) Rev. Sci. Instrum. , vol.76 , pp. 085111-085113
    • Kaiju, H.1    Kawaguchi, N.2    Ishibashi, A.3
  • 7
    • 0027590609 scopus 로고
    • ULSI reliability through ultraclean processing
    • 10.1109/5.220903 0018-9219
    • Ohmi, T.: ' ULSI reliability through ultraclean processing ', Proc. IEEE, 1993, 81, p. 716-729 10.1109/5.220903 0018-9219
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    • Ohmi, T.1
  • 8
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    • Kawaguchi, N., Rahaman, Md.D., Kaiju, H., and Ishibashi, A.: ' Physical analysis of connected clean units in clean-unit system platform ', Jpn. J. Appl. Phys., 2006, 45, p. 6481-6483 10.1143/JJAP.45.6481 0021-4922
    • (2006) Jpn. J. Appl. Phys. , vol.45 , pp. 6481-6483
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  • 9
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    • Cleanbox for wafer transportation
    • in Japanese
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.