Study of very low airborne particle count in clean-unit system platform

Review of Scientific Instruments

Volumn 76, Issue 8, 2005, Pages 1-3

  Kaiju, Hideo ^a   Kawaguchi, Nobuyoshi ^a   Ishibashi, Akira ^a  

^a HOKKAIDO UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BIOTECHNOLOGY; FEEDBACK; PARTICLE ACCELERATORS;

AIRBORNE PARTICLE; CLEAN-UNIT SYSTEM PLATFORM; FEEDBACK LOOP; PARTICLE REDUCTION;

NANOTECHNOLOGY;

EID: 26444606380     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2006387     Document Type: Article

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