Connected box-units-based compact highly clean environment for cross-disciplinary experiments platform

Electronics Letters

Volumn 41, Issue 13, 2005, Pages 735-736

  Ishibashi, A ^a   Kaiju, H ^a   Yamagata, Y ^a   Kawaguchi, N ^a  

^a HOKKAIDO UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BIOTECHNOLOGY; BOUNDARY CONDITIONS; ENVIRONMENTAL ENGINEERING; ETCHING; FIELD EFFECT TRANSISTORS; NANOTECHNOLOGY; PHOTOLITHOGRAPHY; RECYCLING; SEMICONDUCTOR MATERIALS; SOLVENTS;

AMBIENT PARTICLES; BOX-UNITS SYSTEM; CHEMICAL MATERIAL GROWTH; SCANNING PROBE MICROSCOPY (SPM);

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 22944466091     PISSN: 00135194     EISSN: None     Source Type: Journal    
DOI: 10.1049/el:20051053     Document Type: Article

References (6)

1. Ishibashi, A.: 'Possibility of uniting bottom-up structures with top-down systems'. Proc. Int. Symp. Nano Science and Technology, Tainan, Taiwan, 2004, pp. 44-45
2. Ishibashi, A., and Kondo, K.: 'Current-injection induced dislocation networks in II-VI laser diodes: bottom-up structures emerging in top-down systems', Electron. Lett., 2004, 40, pp. 1268-1269
3. Hu, S.C., and Wu, T.M.: 'Experimental study of airflow and particle characteristics of a 300-mm POUP/LPU minienvironment system', IEEE Trans. Semicond. Manuf., 2003, 16, pp. 660-667
4. Mrad, F.: 'The characterization of a clean room assembly process', IEEE Trans. Ind. Appl., 1999, 35, pp. 399-404
5. Hutchins, J.B., Martin, M.D., Belolipetskiy, S., Cox, H.L. Jr., Pitts, W.K., and Walsh, K.M.: 'A low-cost high-performance cleanroom enclosure', IEEE Trans. Educ., 1999, 42, pp. 144-146
6. Tenenbaum, D.J.: 'The cleanroom: how clean?', Environ. Health Perspect., 2003, 111, pp. A282-283