Physical analysis of connected clean units in clean-unit system platform

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 45, Issue 8 A, 2006, Pages 6481-6483

  Kawaguchi, Nobuyoshi ^a   Rahaman, Md Dalilur ^a   Kaiju, Hideo ^a   Ishibashi, Akira ^a  

^a HOKKAIDO UNIVERSITY   (Japan)

Author keywords

Biotechnology; Clean unit; Feedback loop; Nanostructure physics; Nanotechnology; Platform

Indexed keywords

BIOTECHNOLOGY; ELECTRIC CONDUCTANCE; FEEDBACK; NANOTECHNOLOGY;

CLEAN UNIT; FEEDBACK LOOPS; NANOSTRUCTURE PHYSICS; PLATFORM;

PARTICLE SIZE ANALYSIS;

EID: 33748555231     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.45.6481     Document Type: Article

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