Plasma assisted growth of ultrathin nitrides on Si surfaces under ultrahigh vacuum conditions

Journal of Physics: Conference Series

Volumn 86, Issue 1, 2007, Pages

  Morgen, Per ^a   Bahari, Ali ^a,d   Pedersen, Kjeld ^b   Li, Zheshen S ^c  

^a UNIVERSITY OF SOUTHERN DENMARK   (Denmark)

^b AALBORG UNIVERSITY   (Denmark)

^c AARHUS UNIVERSITY   (Denmark)

^d UNIVERSITY OF MAZANDARAN   (Iran)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 36348953098     PISSN: 17426588     EISSN: 17426596     Source Type: Conference Proceeding    
DOI: 10.1088/1742-6596/86/1/012019     Document Type: Article

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