From oxygen adsorption to the growth of thin oxides on silicon surfaces

Computational Materials Science

Volumn 21, Issue 4, 2001, Pages 481-487

  Morgen, P ^a   Jensen, T ^a   Gundlach, C ^a   Takker, L B ^a   Hoffman, S V ^b   Pedersen, K ^c  

^a UNIVERSITY OF SOUTHERN DENMARK   (Denmark)

^b AARHUS UNIVERSITY   (Denmark)

^c AALBORG UNIVERSITY   (Denmark)

Author keywords

[No Author keywords available]

Indexed keywords

ADSORPTION; AGGLOMERATION; COALESCENCE; CRYSTAL ATOMIC STRUCTURE; MOLECULAR STRUCTURE; MONOLAYERS; OXIDATION; OXYGEN; SURFACE PHENOMENA;

ENERGY BARRIERS; MOLECULAR ADSORBATES;

SEMICONDUCTING SILICON;

EID: 0034883652     PISSN: 09270256     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0927-0256(01)00195-1     Document Type: Article

References (15)