LTCC - A fascinating technology platform for miniaturized devices

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6589, Issue , 2007, Pages

  Schmid, U ^a  

^a SAARLAND UNIVERSITY   (Germany)

Author keywords

Injection quantity sensor; Low temperature co fired ceramics; Molybdenum metallization; Multilayer technology; Paramagnetic oxygen sensor; Thin film technology

Indexed keywords

CERAMIC MATERIALS; HIGH TEMPERATURE OPERATIONS; METALLIZING; MOLYBDENUM; SENSORS;

INJECTION QUANTITY SENSORS; LOW TEMPERATURE CO-FIRED CERAMICS; MOLYBDENUM METALLIZATION; MULTILAYER TECHNOLOGY; PARAMAGNETIC OXYGEN SENSORS; THIN FILM TECHNOLOGY;

MICROSTRUCTURE;

EID: 36249017310     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.722793     Document Type: Conference Paper

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