Three-dimensional laser microfabrication of metals, semiconductors, and dielectrics

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6732, Issue , 2007, Pages

  Juodkazis, Saulius ^a   Nishimura, Koichi ^a   Okuno, Hiroki ^b   Tabuchi, Yusuke ^b   Matsuo, Shigeki ^b   Tanaka, Satoru ^c   Misawa, Hiroaki ^a  

^a HOKKAIDO UNIVERSITY   (Japan)

^b UNIVERSITY OF TOKUSHIMA   (Japan)

^c KYUSHU UNIVERSITY   (Japan)

Author keywords

Ablation; Dielectric breakdown; Field enhancement; Laser microfabrication; Light extraction; Ripples

Indexed keywords

DIELECTRIC MATERIALS; ELECTRIC BREAKDOWN; MICROFABRICATION; SILICON CARBIDE; THREE DIMENSIONAL; ULTRASHORT PULSES;

FIELD ENHANCEMENT; LASER MICROFABRICATION; LASER RASTER-SCANNING; LIGHT EXTRACTION;

LASERS;

EID: 36248975205     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.751889     Document Type: Conference Paper

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