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Volumn 516, Issue 2-4, 2007, Pages 272-276

DLC film properties obtained by a low cost and modified pulsed-DC discharge

Author keywords

Diamond like carbon; Mechanical properties; Plasma assisted chemical vapour deposition; Pulsed DC discharge; Structural properties

Indexed keywords

AMORPHOUS SILICON; COST EFFECTIVENESS; ELECTRIC DISCHARGES; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; STRUCTURAL PROPERTIES; SURFACE PROPERTIES;

EID: 36148967674     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2007.06.100     Document Type: Article
Times cited : (46)

References (28)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.