|
Volumn 516, Issue 2-4, 2007, Pages 272-276
|
DLC film properties obtained by a low cost and modified pulsed-DC discharge
|
Author keywords
Diamond like carbon; Mechanical properties; Plasma assisted chemical vapour deposition; Pulsed DC discharge; Structural properties
|
Indexed keywords
AMORPHOUS SILICON;
COST EFFECTIVENESS;
ELECTRIC DISCHARGES;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
STRUCTURAL PROPERTIES;
SURFACE PROPERTIES;
AMORPHOUS SILICON INTERLAYERS;
BULK PROPERTIES;
LOW FRICTION COEFFICIENT;
PULSED-DC DISCHARGE;
DIAMOND LIKE CARBON FILMS;
|
EID: 36148967674
PISSN: 00406090
EISSN: None
Source Type: Journal
DOI: 10.1016/j.tsf.2007.06.100 Document Type: Article |
Times cited : (46)
|
References (28)
|