TEM investigation of TiAlN/CrN multilayer coatings prepared by magnetron sputtering

Surface and Coatings Technology

Volumn 202, Issue 4-7, 2007, Pages 815-819

  Panjan, M ^a   Sturm S ^a   Panjan, P ^a   Cekada M ^a  

^a JO EF STEFAN INSTITUTE   (Slovenia)

Author keywords

HRTEM; Magnetron sputtering; Multilayer; STEM; TEM; TiAlN CrN

Indexed keywords

CRYSTAL MICROSTRUCTURE; EPITAXIAL LAYERS; INTERFACES (MATERIALS); LATTICE CONSTANTS; LATTICE MISMATCH; MAGNETRON SPUTTERING; REACTIVE SPUTTERING;

COLUMNAR MICROSTRUCTURE; MULTILAYER COATINGS;

MULTILAYER FILMS;

CRYSTAL MICROSTRUCTURE; EPITAXIAL LAYERS; INTERFACES (MATERIALS); LATTICE CONSTANTS; LATTICE MISMATCH; MAGNETRON SPUTTERING; MULTILAYER FILMS; REACTIVE SPUTTERING;

EID: 36049052026     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2007.05.084     Document Type: Article

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