Comparative studies on influence of acetylene to argon flow rate ratios on nano-scratch behavior of a-C:H films produced on steel substrates by plasma immersion ion implantation and deposition

Thin Solid Films

Volumn 516, Issue 2-4, 2007, Pages 252-256

  Xu, Ming ^a,b   Cai, Xun ^a   Zhao, Jun ^b,c   Chen, Qiulong ^a   Chu, Paul K ^b  

^a SHANGHAI JIAO TONG UNIVERSITY   (China)

^b CITY UNIVERSITY OF HONG KONG   (Hong Kong)

^c SOUTHWESTERN INSTITUTE OF PHYSICS   (China)

Author keywords

a C:H film; Adhesion strength; Flow ratio; Nano scratch; Plasma immersion ion implantation and deposition; Stainless steel

Indexed keywords

ARGON; BOND STRENGTH (MATERIALS); DEPOSITION; FLOW RATE; ION IMPLANTATION; STAINLESS STEEL;

FLOW RATIO; NANO-SCRATCH; PLASMA IMMERSION ION IMPLANTATION AND DEPOSITION;

CARBON FILMS;

EID: 36048991452     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2007.05.052     Document Type: Article

References (22)

1. Dotto M.E.R., Martins R.N., Ferreira M., and Camargo Jr. S.S. Surf. Coat. Technol. 200 (2006) 6479
2. Robertson J. Mat. Sci. Engin. Reports 37 (2002) 129
3. Liu X.Y., Chu P.K., and Ding C.X. Mat. Sci. Engin. Reports 47 (2004) 49
4. Poon R.W.Y., Yeung K.W.K., Liu X.Y., Chu P.K., Chung C.Y., Lu W.W., Cheung K.M.C., and Chan D. Biomat. 26 (2005) 2265
5. Kwok S.C.H., Wang J., and Chu P.K. Diamond Relat. Mater. 14 (2005) 78
6. Huck H., Halac E.B., Oviedo C., Zampieri G., Pregliasco R.G., Alonso E.V., Reinoso M.E., and de Benyacar M.A.R. Appl. Surf. Sci. 141 (1999) 141
7. Druz B., Zaritskiy I., Hoehn J., Polyakov V.I., Rukovishnikov A.I., and Novotny V. Diamond Relat. Mater. 10 (2001) 931
8. Kumar S., Rauthan C.M.S., Srivatsa K.M.K., Dixit P.N., and Bhattacharyya R. Appl. Surf. Sci. 182 (2001) 326
9. Huang L.-Y., Xu K.-W., Lu J., and Guelorget B. Surf. Coat. Technol. 154 (2002) 232
10. Voevodin A.A., Walck S.D., and Zabinski J.S. Wear 203-204 (1997) 516
11. Jayatissa A.H., Sato F., Saito N., Hirano Y., and Takizawa K. Carbon 38 (2000) 1145
12. Walter K.C., Nastasi M., and Munson C. Surf. Coat. Technol. 93 (1997) 287
13. Anders A. Surf. Coat. Technol. 156 (2002) 3
14. Uzumaki E.T., Lamber C.S., and Zavaglia C.A.C. Key Eng. Mater. 254-256 (2004) 435
15. Liao J.X., Liu W.M., Xu T., and Xue Q.J. Carbon 42 (2004) 387
16. Baba K., and Hatada R. Surf. Coat. Technol. 103-104 (1998) 235
17. Logothetidis S., Charitidis C., Gioti M., Panayiotato Y., Handrea M., and Kautek W. Diamond Relat. Mater. 9 (2000) 756
18. Di Z.F., Huang A.P., Fu R.K.Y., Chu P.K., Shao L., Höchbauer T., Nastasi M., Zhang M., Liu W.L., Shen Q.W., Luo S.H., Song Z.T., and Lin C.L. J. Appl. Phys. 98 (2005) 053502
19. Chu P.K., and Li L.H. Mater. Chem. Phys. 96 (2006) 253
20. Li X.D., and Bhushan B. Thin Solid Films 315 (1998) 214
21. Li X.D., Diao D.F., and Bhushan B. Acta Mater. 45 (1997) 4453
22. Rusli, Yoon S.F., Yang H., Zhang Q., Ahn J., and Fu Y.L. J. Vac. Sci. Technol. A 16 (1998) 572